SURFACE MORPHOLOGY OF SPUTTERED TITANIUM-ALUMINUM-NITRIDE COATINGS

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چکیده

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ژورنال

عنوان ژورنال: Spektra: Jurnal Fisika dan Aplikasinya

سال: 2020

ISSN: 2541-3392,2541-3384

DOI: 10.21009/spektra.051.09